Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2004 · 43 citations · 6 references
EngineeringElectrical EngineeringMaterials ScienceElectronic MaterialsMicroelectronicsSemiconductor DevicesCmos Circuit DesignDevice CharacterizationEtching ProcessesIntegrated Circuit DesignMetal-oxide-semiconductor Field-effect TransistorsSurface RoughnessDevice FabricationDevice OptimizationLine RoughnessLine WidthLine-edge RoughnessPhotoresist EtchingSingle-electron TransistorsThreshold Voltage
ArF lithography is essential to develop a sub-100 <i>nm</i> device, however, line edge roughness (LER) and line width roughness (LWR) is playing a critical role due to the immaturity of photoresist and the lack of etch resistance. Researchers are trying to improve LER/LWR properties by optimizing photoresist materials and process conditions. In this paper, experiment results are presented to study the impact of LER/LWR to device performance so that the reasonable control range of LER/LWR can be defined. To implement the experiment, 80 <i>nm</i> node of single NMOS transistors were fabricated, which had various range of gate length, width, and LER/LWR. The amount of LER/LWR could be successfully controlled by applying different resist materials, defocus, and over etch time. Experimental results show that leakage current is significantly increased when LWR is greater than 10 nm. In addition, it is observed that both threshold voltage and on-off current variation get increased exponentially as gate width decreases.
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Determination of the line edge roughness specification for 34 nm devices
T. Linton, Manish Chandhok, Bryan J. Rice et al. · 2003 · 44 citations
Engineering, Electrical Engineering, Electronic Materials +13