Venue (Journal)
Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena
Also Known As
JVST B, Journal of vacuum science and technology., Journal of vacuum science & technology., Microelectronics and nanometer structures, $I Issues for 2003- have issue PDF table of contents title: $a Journal of vacuum science & technology.
11.8K
Publications
241.7K
Citations
944
Concepts
| # | Concept | H-Index | Publications | Citations |
|---|---|---|---|---|
1 | Engineering | 139 | 6K | 210.7K |
2 | Health Sciences | 31 | 101 | 3.6K |
3 | Education | 24 | 60 | 1.7K |
4 | Business | 4 | 4 | 89 |
5 | Arts | 1 | 1 | 13 |
Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena
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11.8K
Publications
241.7K
Citations
Showing yearly statistics from 2000-2026.
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