Concepedia

Geng Han

GH

15

Publications

464

Citations

13

H-Index

1999

Active since

Affiliations

University of Wisconsin–Madison(Current)

IBM (United States)

GlobalFoundries (United States)

Advanced Micro Devices (United States)

Samsung (United States)

Geng Han is an author at University of Wisconsin–Madison specializing in engineering, microelectronics, and applied physics.

Top concepts

EngineeringMicroelectronicsApplied PhysicsComputer EngineeringElectrical Engineering3D PrintingOptoelectronicsMicrofabricationPhysicsMicroscopy

Publications per year

1999–2022

15

Publications

15

Resist line edge roughness and aerial image contrast

J. Shin, Geng Han, Yuling Ma et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2001 · 89 citations

Engineering, Edge Detection, Microscopy +8

22nm High-performance SOI technology featuring dual-embedded stressors, Epi-Plate High-K deep-trench embedded DRAM and self-aligned Via 15LM BEOL

P. Chang, C. Ortolland, David Fried et al. · 2012 · 89 citations

High-performance Soi Technology, Engineering, Vlsi Design +16

A 7nm CMOS technology platform for mobile and high performance compute application

B. Jagannathan, Akihisa Ogino, D. Jaeger et al. · 2017 · 58 citations

Engineering, Vlsi Design, Computer Architecture +17

Reducing DfM to practice: the lithography manufacturability assessor

Lars W. Liebmann, Scott Mansfield, Geng Han et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2006 · 40 citations

Engineering, Industrial Engineering, Digital Manufacturing +19

Comprehensive model of electron energy deposition

Geng Han, Mumit Khan, Yanghua Fang et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2002 · 27 citations

Electrical Engineering, Engineering, Physics +14

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