Concepedia

J. Shin

JS

3

Publications

197

Citations

3

H-Index

2001

Active since

Affiliations

University of Wisconsin–Madison(Current)

J. Shin is an author at University of Wisconsin–Madison specializing in engineering, applied physics, and nanoelectronics.

ORCID

Top concepts

Publications per year

2001–2004

3

Publications

3

Resist line edge roughness and aerial image contrast

J. Shin, Geng Han, Yuling Ma et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2001 · 89 citations

, , +8

Experimental Investigation of the Impact of LWR on Sub-100-nm Device Performance

Hae‐Won Kim, Jeong Yong Lee, J. Shin et al. · IEEE Transactions on Electron Devices · 2004 · 88 citations

, , +18

Line edge roughness and photoresist percolation development model

Yuansheng Ma, J. Shin, F. Cerrina · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2002 · 20 citations

, , +17

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