Concepedia

Yuansheng Ma

YM

16

Publications

455

Citations

14

H-Index

1999

Active since

Affiliations

Mentor Technologies(Current)

IMEC

University of Wisconsin–Madison

GlobalFoundries (United States)

Advanced Micro Devices (United States)

Yuansheng Ma is an author at Mentor Technologies specializing in engineering, microelectronics, and computer-aided design.

Top concepts

Publications per year

1999–2023

16

Publications

16

Direct extraction of semiconductor device parameters using lateral optimization method

A. Ortíz-Conde, Yuansheng Ma, J. Thomson et al. · Solid-State Electronics · 1999 · 63 citations

, , +2

Challenges and opportunities in applying grapho-epitaxy DSA lithography to metal cut and contact/via applications

Yuansheng Ma, J. Andres Torres, Germain Fenger et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2014 · 52 citations

Line edge roughness impact on critical dimension variation

Yuansheng Ma, Harry Levinson, Thomas I. Wallow · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2007 · 43 citations

, , +18

Hydrogen silsesquioxane as a high resolution negative-tone resist for extreme ultraviolet lithography

Ivan Junarsa, Mark P. Stoykovich, Paul F. Nealey et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2005 · 42 citations · Full text

, , +15

Decomposition strategies for self-aligned double patterning

Yuansheng Ma, Jason Sweis, Chris Bencher et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2010 · 41 citations

, , +18

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