Germain Fenger

Implementation of templated DSA for via layer patterning at the 7nm node

Roel Gronheid, Jan Doise, Joost Bekaert et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2015 · 114 citations

Engineering, Materials Engineering, Materials Science +17

Challenges and opportunities in applying grapho-epitaxy DSA lithography to metal cut and contact/via applications

Yuansheng Ma, J. Andres Torres, Germain Fenger et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2014 · 52 citations

Engineering, Manufacturing Engineering, Materials Science +13

Demonstration of High Performance TFTs on Silicon-on-Glass (SiOG) Substrate

David Dawson‐Elli, Carlo A. Kosik Williams, J. G. Couillard et al. · ECS Transactions · 2007 · 25 citations

Engineering, Electrical Engineering, Materials Science +17

Mask 3D effects and compensation for high NA EUV lithography

Sudharshanan Raghunathan, Greg McIntyre, Germain Fenger et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 24 citations

Engineering, Manufacturing Engineering, 3D Modeling +13

Physical verification and manufacturing of contact/via layers using grapho-epitaxy DSA processes

J. Andres Torres, Kyohei Sakajiri, David S. Fryer et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2014 · 18 citations

Engineering, Manufacturing Engineering, Materials Science +9