Kyohei Sakajiri

Model-based SRAF insertion through pixel-based mask optimization at 32nm and beyond

Kyohei Sakajiri, Alexander Tritchkov, Yuri Granik · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2008 · 21 citations

Computing, Computer Engineering, Computer Science +11

Physical verification and manufacturing of contact/via layers using grapho-epitaxy DSA processes

J. Andres Torres, Kyohei Sakajiri, David S. Fryer et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2014 · 18 citations

Engineering, Manufacturing Engineering, Materials Science +9

Hyper-NA imaging of 45nm node random CH layouts using inverse lithography

Eric Hendrickx, Alexander Tritchkov, Kyohei Sakajiri et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2008 · 14 citations

Engineering, Computational Design, Biomedical Imaging +9

Model based insertion of assist features using pixel inversion method: implementation in 65nm node

Chi‐Yuan Hung, Qingwei Liu, Kyohei Sakajiri et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2006 · 11 citations

Engineering, Manufacturing Engineering, Computer-aided Design +13

On objectives and algorithms of inverse methods in microlithography

Yuri Granik, Kyohei Sakajiri, Shumay Shang · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2006 · 11 citations

Natural Sciences, Computer Science, Mathematics +7