Concepedia

Scott Mansfield

SM

15

Publications

1.3K

Citations

13

H-Index

1990

Active since

Affiliations

IBM (United States)(Current)

Stanford University

Scott Mansfield is an author at IBM (United States) specializing in engineering, microelectronics, and computer engineering.

Top concepts

EngineeringApplied PhysicsMicroelectronicsComputer EngineeringOphthalmologyMicrofabricationOptoelectronicsDesignRadiologyMicroscopy

Publications per year

1990–2013

15

Publications

15

Solid immersion microscope

Scott Mansfield, G. S. Kino · Applied Physics Letters · 1990 · 663 citations

Engineering, Microscopy, New Type +17

High-numerical-aperture lens system for optical storage

Scott Mansfield, W. R. Studenmund, G. S. Kino et al. · Optics Letters · 1993 · 162 citations

Photonics, Optical Materials, Organic Photonics +15

Level-specific lithography optimization for 1-Gb DRAM

Alfred K. K. Wong, Richard A. Ferguson, Scott Mansfield et al. · IEEE Transactions on Semiconductor Manufacturing · 2000 · 108 citations

Level-specific Lithography Optimization, Physical Design (Electronics), Wafer Scale Processing +14

TCAD development for lithography resolution enhancement

Lars W. Liebmann, Scott Mansfield, Alfred K. K. Wong et al. · IBM Journal of Research and Development · 2001 · 74 citations

Wafer Scale Processing, Engineering, Vlsi Design +14

Reducing DfM to practice: the lithography manufacturability assessor

Lars W. Liebmann, Scott Mansfield, Geng Han et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2006 · 40 citations

Engineering, Industrial Engineering, Digital Manufacturing +19

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