IEEE Transactions on Semiconductor Manufacturing

Scheduling semiconductor wafer fabrication

Lawrence M. Wein · 1988 · 659 citations

Engineering, Industrial Engineering, Manufacturing Engineering +17

Material removal mechanism in chemical mechanical polishing: theory and modeling

Jianfeng Luo, David Dornfeld · 2001 · 641 citations

Engineering, Materials Engineering, Materials Science +16

Fifty Years of Moore's Law

Chris A. Mack · 2011 · 634 citations

Engineering, Computer Engineering, Electrical Engineering +15

A Convolutional Neural Network for Fault Classification and Diagnosis in Semiconductor Manufacturing Processes

Ki Bum Lee, Sejune Cheon, Chang Ouk Kim · 2017 · 475 citations

Computing, Computer Science, Manufacturing Engineering +17

Fault Detection Using the k-Nearest Neighbor Rule for Semiconductor Manufacturing Processes

Qin He, Jin Wang · 2007 · 457 citations

Engineering, Industrial Engineering, Manufacturing Engineering +16