99
Publications
3.1K
Citations
26
H-Index
1985
Active since
Chris A. Mack is an author at KLA (United States) specializing in engineering, applied physics, and microelectronics.
Top concepts
EngineeringApplied PhysicsMicroelectronicsMicrofabricationNatural SciencesOptical PropertiesInstrumentationComputer EngineeringPhysicsMaterial Science
Publications per year
1985–2022
99
99
Chris A. Mack · IEEE Transactions on Semiconductor Manufacturing · 2011 · 612 citations
Development of Positive Photoresists
Chris A. Mack · Journal of The Electrochemical Society · 1987 · 153 citations
Investigation of microstructured milling tool for deferring tool wear
Wenlong Chang, Jining Sun, Xichun Luo et al. · Wear · 2011 · 112 citations
Materials Science, Microstructured Milling Tool, Engineering +6
Generating random rough edges, surfaces, and volumes
Chris A. Mack · Applied Optics · 2013 · 92 citations
Rows per page
1–5 of 99