PROLITH: A Comprehensive Optical Lithography Model

Abstract

The Positive Resist Optical Lithography model (PROLITH) is introduced. The model predicts resist profiles for submicron projection, proximity and contact printing. Included are models for optical projection systems, the standing wave effect for projection printing, a diffraction model for contact printing, a kinetic model for the exposure reaction, and a kinetic model of the development process. Also included in PROLITH are the effects of prebake conditions and polychromatic exposure.