Concepedia

Concept

microfabrication

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150.2K

Publications

7.1M

Citations

335.9K

Authors

15.5K

Institutions

About

Microfabrication is a fundamental methodological approach focused on the design, creation, and assembly of structures and devices with characteristic dimensions ranging from micrometers to sub-micrometers. It encompasses a diverse array of techniques, including lithography, etching, and deposition, enabling the miniaturization and integration of complex systems essential for advancements across numerous scientific and engineering disciplines, such as electronics, photonics, and bioengineering.

Top Authors

Rankings shown are based on concept H-Index.

GM

Harvard University

BB

The Ohio State University

LJ

Chinese Academy of Sciences

JA

University of Illinois Urbana-Champaign

MS

Max Planck Institute for Intelligent Systems

Top Institutions

Rankings shown are based on concept H-Index.

Harvard University

Cambridge, United States

University of California, Berkeley

Berkeley, United States

Stanford University

Stanford, United States