Cleanroom Processing

Cleanroom Processing is a specialized fabrication methodology within microfabrication that involves the controlled manufacturing of microscale devices in an environment rigorously free of particulate and molecular contamination to ensure structural integrity and functional performance.

664

Publications

24.2K

Citations

2.5K

Authors

691

Institutions

Publications per year

2017–2026

142

Parents

Microfabrication

Children

Bulk Gas PurificationChemical Contamination ControlChemical-mechanical Polishing CleanlinessCleanroom Garment MaterialsCleanroom MaintenanceElectrostatic Discharge ControlEpitaxial Growth CleanlinessEquipment DecontaminationHepa FiltrationLaminar Flow Systems

Publications

664

The Evolution of Silicon Wafer Cleaning Technology

Werner Kern · Journal of The Electrochemical Society · 1990 · 1.7K citations

Engineering, Electrical Engineering, Materials Science +17

Cleaning solutions based on hydrogen peroxide for use in silicon semiconductor technology

Werner Kern · Medical Entomology and Zoology · 1970 · 820 citations

Engineering, Materials Engineering, Materials Science +14

Ultrasonic cleaning: An historical perspective

Timothy J. Mason · Ultrasonics Sonochemistry · 2015 · 319 citations · Full text

Architecture, Dental Hygiene, Ultrasound +13

Efficient pulsed laser removal of 0.2 μm sized particles from a solid surface

Werner Zapka, W. Ziemlich, A. C. Tam · Applied Physics Letters · 1991 · 229 citations

Engineering, Materials Engineering, Materials Science +17

A prototype cleaning map: A classification of industrial cleaning processes

P.J. Fryer, Konstantia Asteriadou · Trends in Food Science & Technology · 2009 · 196 citations

Engineering, Industrial Engineering, Automation +11

1–5 of 664

Authors

2.5K

AB
Ahmed Busnaina
Northeastern University, United States
13 publications · 485 citations
12
h-index
JP
Jin-Goo Park
Hanyang University, South Korea
11 publications · 317 citations
11
h-index
PM
Paul Mertens
IMEC, Belgium
9 publications · 212 citations
9
h-index
MH
Marc Heyns
IMEC, Belgium
7 publications · 269 citations
7
h-index
DC
Da‐Ren Chen
Washington University in St. Louis, United States
5 publications · 316 citations
6
h-index

1–5 of 2.5K

Institutions

691

1–8 of 691

Venues

Journal of The Electrochemical Society
JES · 36 publications · 3K citations
22
h-index
Applied Surface Science
22 publications · 879 citations
18
h-index
Microelectronic Engineering
18 publications · 591 citations
15
h-index
IEEE Transactions on Semiconductor Manufacturing
15 publications · 662 citations
14
h-index
Powder Technology
15 publications · 646 citations
13
h-index

1–5