Concepedia

W. Ziemlich

WZ

6

Publications

731

Citations

6

H-Index

1991

Active since

Affiliations

IBM Research - Almaden(Current)

IDEXX Laboratories (Germany)

IBM (United States)

Klinikum Sindelfingen-Böblingen

W. Ziemlich is an author at IBM Research - Almaden specializing in engineering, laser micro-processing, and laser applications.

Top concepts

EngineeringSurface ScienceLaser ApplicationsLaser Micro-processingLaser-surface InteractionsLaser OpticsMaterial ScienceChemical EngineeringMicrofabricationHigh-power Lasers

Publications per year

1991–1993

6

Publications

6

Laser-cleaning techniques for removal of surface particulates

A. C. Tam, W. P. Leung, Werner Zapka et al. · Journal of Applied Physics · 1992 · 412 citations

Optical Materials, Engineering, Laser Applications +20

Efficient pulsed laser removal of 0.2 μm sized particles from a solid surface

Werner Zapka, W. Ziemlich, A. C. Tam · Applied Physics Letters · 1991 · 227 citations

Optical Materials, Laser Processing (Laser Material Processing), Engineering +24

“Laser cleaning” removes particles from surfaces

Werner Zapka, W. Ziemlich, W. P. Leung et al. · Microelectronic Engineering · 1993 · 49 citations

” Removes Particles, Engineering, Surface Science +2

Laser cleaning of wafer surfaces and lithography masks

Werner Zapka, A. C. Tam, W. Ziemlich · Microelectronic Engineering · 1991 · 15 citations

Advanced Laser Processing, Engineering, Microfabrication +4

Laser cleaning: Laser‐induced removal of particles from surfaces

Werner Zapka, W. Ziemlich, W. P. Leung et al. · Advanced Materials for Optics and Electronics · 1993 · 14 citations

Materials Science, Laser Optics, Chemical Engineering +15

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