Microelectronic Engineering · 1993 · 49 citations · 7 references
” Removes ParticlesEngineeringSurface ScienceLaser Processing TechnologyLaser-surface Interactions
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Laser-cleaning techniques for removal of surface particulates
A. C. Tam, W. P. Leung, Werner Zapka et al. · Journal of Applied Physics · 1992 · 412 citations
Laser-assisted micron scale particle removal
K. Imen, Shyan J. Lee, Susan D. Allen · Applied Physics Letters · 1991 · 119 citations
Removal of small particles from surfaces by pulsed laser irradiation: observations and a mechanism
J. D. Kelley, Michael I. Stuff, Floyd E. Hovis et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1991 · 27 citations
Chemical Engineering, Optical Materials, Particle Removal +15