Nanoimprint Lithography is a nanofabrication technique that belongs to the class of lithographic methods, distinguished by its use of a physical mold or stamp to mechanically deform a resist material on a substrate, thereby creating nanoscale patterns through direct embossing.
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Nanoimprint Lithography: Methods and Material Requirements
L. Jay Guo · Advanced Materials · 2007 · 1.8K citations · Full text
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