Anti-sticking Layers

Anti-Sticking Layers is a functional coating applied in nanoimprint lithography that prevents adhesion between the imprint mold and the resist material by minimizing interfacial interactions, thereby enabling defect-free pattern transfer and easy demolding.

46

Publications

1.6K

Citations

219

Authors

71

Institutions

Publications per year

2017–2026

14

Authors

219

  1. HS
    Hella‐Christin Scheer

    University of Wuppertal, Germany

    6 publications · 178 citations

    6

    h-index

  2. MZ
    M. Zelsmann

    Centre National de la Recherche Scientifique, France

    4 publications · 108 citations

    4

    h-index

  3. AB
    A. Beaurain

    Centre National de la Recherche Scientifique, France

    4 publications · 115 citations

    4

    h-index

  4. HS
    H. Schulz

    University of Wuppertal, Germany

    4 publications · 133 citations

    4

    h-index

  5. BP
    B. Pelissier

    Centre National de la Recherche Scientifique, France

    3 publications · 94 citations

    3

    h-index

1–5 of 219

Venues

  1. 6

    h-index

  2. Microelectronic Engineering

    6 publications · 185 citations

    6

    h-index

  3. 5

    h-index

  4. Nanotechnology

    4 publications · 93 citations

    4

    h-index

  5. Applied Surface Science

    3 publications · 84 citations

    3

    h-index

1–5