Filling Dynamics

Filling Dynamics is a physical process model in nanoimprint lithography that characterizes the manner and temporal evolution of polymer flow into nanoscale mold cavities under applied pressure and temperature, distinguishing it from other lithographic mechanisms by its focus on viscous deformation and interfacial interactions during pattern replication.

147

Publications

7.2K

Citations

638

Authors

195

Institutions

Publications per year

2017–2026

19

Authors

638

  1. JV
    John V. Tyberg

    University of Calgary, Canada

    5 publications · 220 citations

    5

    h-index

  2. PK
    Pranab Kumar Mondal

    Indian Institute of Technology Guwahati, India

    4 publications · 87 citations

    4

    h-index

  3. PG
    Pantaleo Giannuzzi

    Fondazione Salvatore Maugeri, Italy

    3 publications · 677 citations

    3

    h-index

  4. HD
    Harry D. Rowland

    University of Illinois Urbana-Champaign, United States

    3 publications · 354 citations

    3

    h-index

  5. WP
    William P. King

    University of Illinois Urbana-Champaign, United States

    3 publications · 354 citations

    3

    h-index

1–5 of 638

Venues

  1. 10

    h-index

  2. Polymer Engineering and Science

    7 publications · 266 citations

    7

    h-index

  3. Circulation

    5 publications · 431 citations

    5

    h-index

  4. Journal of the American College of Cardiology

    JACC · 4 publications · 1.2K citations

    4

    h-index

  5. Japanese Journal of Applied Physics

    JJAP · 4 publications · 115 citations

    4

    h-index

1–5