Hiroshi Hiroshima

Publications

2.1K

Citations

H-Index

1983

Active since

Affiliations

National Institute of Advanced Industrial Science and Technology(Current)

Japan Science and Technology Agency

Tokyo University of Science

University of Hyogo

Osaka Prefecture University

Hiroshi Hiroshima is an author at National Institute of Advanced Industrial Science and Technology specializing in engineering, microfabrication, and materials science.

ORCID

Top concepts

EngineeringMaterial ScienceMicrofabricationApplied Physics3D PrintingNanofabricationNanomaterialsNanotechnologyNanolithographyMicroelectronics

Publications per year

1983–2018

Publications

Control of Bubble Defects in UV Nanoimprint

Hiroshi Hiroshima, Masanori Komuro · Japanese Journal of Applied Physics · 2007 · 134 citations

Materials Science, Imprint Pressure, Chemical Engineering +15

Imprint Characteristics by Photo-Induced Solidification of Liquid Polymer

Masanori Komuro, Jun Taniguchi, Seiji Inoue et al. · Japanese Journal of Applied Physics · 2000 · 129 citations

Engineering, Biomedical Engineering, Polymer Technology +20

Highly suppressed short-channel effects in ultrathin SOI n-MOSFETs

E. Suzuki, K. Ishii, S. Kanemaru et al. · IEEE Transactions on Electron Devices · 2000 · 120 citations

Semiconductor Technology, Electrical Engineering, Engineering +10

Room temperature replication in spin on glass by nanoimprint technology

Satoshi� Matsui, Y. Igaku, H. Ishigaki et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2001 · 89 citations

Engineering, Glass-forming Liquid, Mechanical Engineering +21

Measurement of Adhesive Force Between Mold and Photocurable Resin in Imprint Technology

Jun Taniguchi, Takeshi Kawasaki, Yuji Tokano et al. · Japanese Journal of Applied Physics · 2002 · 79 citations

Food Packaging, Engineering, Mechanical Engineering +16

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