Satoshi� Matsui

Observation and characteristics of mechanical vibration in three-dimensional nanostructures and pillars grown by focused ion beam chemical vapor deposition

Jun‐ichi Fujita, M. Ishida, Toshitsugu Sakamoto et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2001 · 104 citations

Engineering, Micromechanics, Mechanical Engineering +19

Room-temperature nanoimprint and nanotransfer printing using hydrogen silsequioxane

Satoshi� Matsui, Y. Igaku, H. Ishigaki et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2003 · 90 citations

Engineering, Pattern Transfer, Biomedical Engineering +19

Room temperature replication in spin on glass by nanoimprint technology

Satoshi� Matsui, Y. Igaku, H. Ishigaki et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2001 · 89 citations

Engineering, Glass-forming Liquid, Mechanical Engineering +21

Carbon nanopillar laterally grown with electron beam-induced chemical vapor deposition

Jun‐ichi Fujita, M. Ishida, T. Ichihashi et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2003 · 70 citations

Nanosheet, Engineering, Carbon Nanopillar +17

Growth of three-dimensional nano-structures using FIB-CVD and its mechanical properties

Jun‐ichi Fujita, M. Ishida, T. Ichihashi et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 2003 · 61 citations

Materials Science, Three-dimensional Nano-structures, Engineering +10