Satoshi� Matsui

Observation and characteristics of mechanical vibration in three-dimensional nanostructures and pillars grown by focused ion beam chemical vapor deposition

Jun‐ichi Fujita, M. Ishida, Toshitsugu Sakamoto et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2001 · 104 citations

Natural Sciences, Materials Engineering, Materials Science +15

Room-temperature nanoimprint and nanotransfer printing using hydrogen silsequioxane

Satoshi� Matsui, Y. Igaku, H. Ishigaki et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2003 · 91 citations

Engineering, Materials Engineering, Materials Science +12

Room temperature replication in spin on glass by nanoimprint technology

Satoshi� Matsui, Y. Igaku, H. Ishigaki et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2001 · 90 citations

Engineering, Materials Engineering, Materials Science +15

Carbon nanopillar laterally grown with electron beam-induced chemical vapor deposition

Jun‐ichi Fujita, M. Ishida, T. Ichihashi et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2003 · 70 citations

Natural Sciences, Materials Engineering, Materials Science +11

Growth of three-dimensional nano-structures using FIB-CVD and its mechanical properties

Jun‐ichi Fujita, M. Ishida, T. Ichihashi et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 2003 · 61 citations

Engineering, Materials Engineering, Materials Science +10