Concepedia
Statistics
Publications
3
Citations
237
H-Index
Active since
2001
Affiliations
Himeji University(Current)
NEC (Japan)
NTT Basic Research Laboratories
Y. Igaku is an author at Himeji University specializing in materials engineering, thermal expansion, and engineering.
Publications per year
2001–2003
Room-temperature nanoimprint and nanotransfer printing using hydrogen silsequioxane
Satoshi� Matsui, Y. Igaku, H. Ishigaki et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2003 · 91 citations
Engineering, Materials Engineering, Materials Science +12
Room temperature replication in spin on glass by nanoimprint technology
Satoshi� Matsui, Y. Igaku, H. Ishigaki et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2001 · 90 citations
Engineering, Materials Engineering, Materials Science +15
Room Temperature Nanoimprint Technology Using Hydrogen Silsequioxane (HSQ)
Y. Igaku, Shinji Matsui, Hiroyuki Ishigaki et al. · Japanese Journal of Applied Physics · 2002 · 56 citations
Engineering, Materials Engineering, Materials Science +10
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