Carbon nanopillar laterally grown with electron beam-induced chemical vapor deposition

Abstract

We found that the lateral growth of a carbon nanopillar with electron beam-induced chemical vapor deposition (EB-CVD) was mainly dominated by forward scattering of the electron beam. The minimum diameter of the carbon nanopillar was reduced to 5 nm. In contrast, vertical growth with EB-CVD produced thicker pillars ∼50 nm in diameter, with a shape that reflected forward scattering of the primary electrons. Graphitization of the amorphous carbon nanopillars was also demonstrated by annealing, in which nanoiron particle traces were graphitized.