43
Publications
2K
Citations
26
H-Index
1987
Active since
Takashi Kaito is an author at Japan Science and Technology Agency specializing in engineering, applied physics, and materials science.
Top concepts
EngineeringApplied PhysicsMaterial ScienceNanotechnologyMicrofabricationNanomaterialsNanofabricationNanomanufacturingMaterials EngineeringElectrical Engineering
Publications per year
1987–2009
43
43
Three-dimensional nanostructure fabrication by focused-ion-beam chemical vapor deposition
Shinji Matsui, Takashi Kaito, Jun‐ichi Fujita et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2000 · 430 citations
Engineering, Micro-optical Component, Aromatic Hydrocarbon Precursor +21
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