Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2000 · 432 citations · 4 references
EngineeringMaterials EngineeringMaterials ScienceMicrofabricationNanomaterialsNanotechnologyChemical Vapor DepositionMems FabricationMicrofabrication ProcessesMicromachiningMicrostructure ControlThin-film DepositionAmorphous CarbonFilm DepositionFilm MicrostructureMicrobeam DesignMicroscale FabricationMicrostructureMicrostructure FabricationSilicon
The study discusses production of 3‑D nanostructures and proposes microstructure plastic arts as a new field, exemplified by a microwine glass of 2.75 µm diameter and 12 µm height. The authors characterized the deposited film on silicon using transmission electron microscopy and Raman spectroscopy, and illustrated the technique by fabricating a microwine glass with 2.75 µm diameter and 12 µm height. They demonstrated 3‑D nanostructure fabrication via 30 keV Ga⁺ focused ion beam assisted deposition of an aromatic hydrocarbon precursor, producing diamond‑like amorphous carbon films and microcoils, drills, and bellows of 0.1 µm dimensions.
Three-dimensional nanostructure fabrication has been demonstrated by 30 keV Ga+ focused ion beam assisted deposition using a aromatic hydrocarbon precursor. The characterization of deposited film on a silicon substrate was performed by a transmission microscope and Raman spectra. This result indicates that the deposition film is a diamondlike amorphous carbon. Production of three-dimensional nanostructure is discussed. Microcoil, drill, and bellows with 0.1 μm dimension were fabricated as parts of the microsystem. Furthermore, microstructure plastic arts is advocated as a new field using microbeam technology, presenting one example of a microwine glass with 2.75 μm external diameter and 12 μm height.
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Raman spectra of diamondlike amorphous carbon films
Masanobu Yoshikawa, Gen Katagiri, H. Ishida et al. · Journal of Applied Physics · 1988 · 262 citations