74
Publications
2.6K
Citations
27
H-Index
1989
Active since
Kazuhiro Kanda is an author at University of Hyogo specializing in engineering, materials science, and applied physics.
Top concepts
EngineeringMaterial ScienceApplied PhysicsMicrofabricationSurface ScienceNanomaterialsNanotechnologyNanofabricationMaterials EngineeringThin Films
Publications per year
1989–2023
74
74
Three-dimensional nanostructure fabrication by focused-ion-beam chemical vapor deposition
Shinji Matsui, Takashi Kaito, Jun‐ichi Fujita et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2000 · 430 citations
Engineering, Micro-optical Component, Aromatic Hydrocarbon Precursor +21
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1–5 of 74