Statistics
Publications
66
Citations
2.4K
H-Index
28
Active since
1993
Yuichi Haruyama is an author at University of Hyogo specializing in engineering, materials science, and applied physics.
Publications per year
1993–2021
66
66
Three-dimensional nanostructure fabrication by focused-ion-beam chemical vapor deposition
Shinji Matsui, Takashi Kaito, Jun‐ichi Fujita et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2000 · 430 citations
Engineering, Micro-optical Component, Aromatic Hydrocarbon Precursor +21
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