Concepedia

Masanori Komuro

MK

53

Publications

2.2K

Citations

23

H-Index

1972

Active since

Affiliations

Tokyo University of Science(Current)

National Institute of Advanced Industrial Science and Technology

Himeji University

Electrotechnical Institute

Tokyo University of Agriculture and Technology

Masanori Komuro is an author at Tokyo University of Science specializing in engineering, applied physics, and materials science.

Top concepts

Publications per year

1972–2007

53

Publications

53

Three-dimensional nanostructure fabrication by focused-ion-beam chemical vapor deposition

Shinji Matsui, Takashi Kaito, Jun‐ichi Fujita et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2000 · 430 citations

, , +21

Control of Bubble Defects in UV Nanoimprint

Hiroshi Hiroshima, Masanori Komuro · Japanese Journal of Applied Physics · 2007 · 134 citations

, , +15

Imprint Characteristics by Photo-Induced Solidification of Liquid Polymer

Masanori Komuro, Jun Taniguchi, Seiji Inoue et al. · Japanese Journal of Applied Physics · 2000 · 129 citations

, , +20

Room-temperature nanoimprint and nanotransfer printing using hydrogen silsequioxane

Satoshi� Matsui, Y. Igaku, H. Ishigaki et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2003 · 90 citations

, , +19

Room temperature replication in spin on glass by nanoimprint technology

Satoshi� Matsui, Y. Igaku, H. Ishigaki et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2001 · 89 citations

, , +21

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