Micromachining

Micromachining is a subtractive fabrication process within the field of Microelectromechanical Systems that involves the precise removal of material from a substrate at the microscale to create three-dimensional mechanical structures and devices.

9.9K

Publications

489.7K

Citations

24.7K

Authors

3.1K

Institutions

Publications per year

2017–2026

1.8K

Variants

Micro-machining

Parents

Microelectromechanical Systems

Children

Anisotropic EtchingDeep Reactive Ion EtchingElectrochemical MicromachiningFocused Ion Beam MachiningHigh-aspect-ratio MicromachiningIsotropic EtchingLaser MicromachiningMems Device PackagingMicro-assemblyMicro-electro-discharge Machining

Publications

9.9K

SOFT LITHOGRAPHY

Younan Xia, George M. Whitesides · Annual Review of Materials Science · 1998 · 4.6K citations

Engineering, Materials Engineering, Materials Science +16

Monolithic Microfabricated Valves and Pumps by Multilayer Soft Lithography

Marc Unger, Hou-Pu Chou, Todd Thorsen et al. · Science · 2000 · 4K citations

Engineering, Bioengineering, Biomedical Engineering +17

Femtosecond laser micromachining in transparent materials

Rafael R. Gattass, Eric Mazur · Nature Photonics · 2008 · 3.2K citations

Engineering, Materials Engineering, Materials Science +14

Finer features for functional microdevices

Satoshi Kawata, Hong‐Bo Sun, Tomokazu Tanaka et al. · Nature · 2001 · 2.8K citations

Engineering, Computer Engineering, Functional Materials +12

Ultra-high-Q toroid microcavity on a chip

Tobias J. Kippenberg, S. M. Spillane, Kerry J. Vahala · Nature · 2003 · 2.2K citations

Engineering, Electrical Engineering, Physics +10

1–5 of 9.9K

Authors

24.7K

RT
Roger T. Howe
University of California, Berkeley, United States
53 publications · 6K citations
38
h-index
MG
Mark G. Allen
Georgia Institute of Technology, United States
69 publications · 3.3K citations
33
h-index
RM
R.S. Muller
University of California, Berkeley, United States
42 publications · 4.4K citations
30
h-index
HF
Hiroyuki Fujita
The University of Tokyo, Japan
55 publications · 2.9K citations
30
h-index
BK
B.T. Khuri-Yakub
Stanford University, United States
45 publications · 3.1K citations
29
h-index

1–5 of 24.7K

Institutions

3.1K

1–8 of 3.1K

Venues

Journal of Microelectromechanical Systems
469 publications · 35.7K citations
101
h-index
Sensors and Actuators A Physical
583 publications · 30.1K citations
88
h-index
Journal of Micromechanics and Microengineering
JMM · 734 publications · 32.9K citations
83
h-index
Journal of Materials Processing Technology
185 publications · 12K citations
61
h-index
International Journal of Machine Tools and Manufacture
104 publications · 8.9K citations
58
h-index

1–5