Concepedia

R.S. Muller

RM

Statistics

Publications

148

Citations

10.5K

H-Index

57

Active since

1963

Affiliations

University of California, Berkeley(Current)

R.S. Muller is an author at University of California, Berkeley specializing in engineering, electrical engineering, and materials science.

Publications per year

1963–2021

148

Publications

148

Surface micromachining for microelectromechanical systems

J.M. Bustillo, Roger T. Howe, R.S. Muller · Proceedings of the IEEE · 1998 · 639 citations

Engineering, Materials Engineering, Materials Science +17

Etch rates for micromachining processing

K.R. Williams, R.S. Muller · Journal of Microelectromechanical Systems · 1996 · 634 citations

Engineering, Materials Engineering, Materials Science +17

IC-processed electrostatic micromotors

Long-Shen Fan, Yu‐Chong Tai, R.S. Muller · Sensors and Actuators · 1989 · 488 citations

Large-scale broadband digital silicon photonic switches with vertical adiabatic couplers

Tae Joon Seok, Niels Quack, Sangyoon Han et al. · Optica · 2016 · 307 citations · Full text

Engineering, Computer Engineering, Electrical Engineering +17

Integrated movable micromechanical structures for sensors and actuators

L.-S. Fan, R.S. Muller · IEEE Transactions on Electron Devices · 1988 · 296 citations

Engineering, Materials Science, Mechanical Engineering +17

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