L.-S. Fan

Integrated movable micromechanical structures for sensors and actuators

L.-S. Fan, R.S. Muller · IEEE Transactions on Electron Devices · 1988 · 295 citations

Movable Micromechanical Structures, Engineering, Mechanical Engineering +18

High-density data storage using proximal probe techniques

H. J. Mamin, B. D. Terris, L.-S. Fan et al. · IBM Journal of Research and Development · 1995 · 128 citations

Non-volatile Memory, Optical Materials, Engineering +18

IC-processed micro-motors: design, technology, and testing

Yuan‐Chuan Tai, L.-S. Fan, R.S. Muller · 2003 · 117 citations

Driving Fields, Engineering, Mechanical Engineering +17

Dual-stage servo controller for HDD using MEMS microactuator

T. Semba, Toshiki Hirano, John Hong et al. · IEEE Transactions on Magnetics · 1999 · 102 citations

Industrial Electronics, Engineering, Microfabrication +13

Electrostatic microactuator and design considerations for HDD applications

L.-S. Fan, Toshiki Hirano, John Hong et al. · IEEE Transactions on Magnetics · 1999 · 53 citations

Electrical Engineering, Engineering, Soft Robotics +12