21
Publications
1.1K
Citations
16
H-Index
1988
Active since
L.-S. Fan is an author at IBM Research - Almaden specializing in engineering, microfabrication, and mechanical engineering.
Top concepts
EngineeringMicrofabricationMechanical EngineeringMechatronicsMaterial ScienceMechanical SystemsApplied PhysicsInstrumentationMicroelectronicsMechanics Of Materials
Publications per year
1988–2024
21
21
High-density data storage using proximal probe techniques
H. J. Mamin, B. D. Terris, L.-S. Fan et al. · IBM Journal of Research and Development · 1995 · 128 citations
IC-processed micro-motors: design, technology, and testing
Yuan‐Chuan Tai, L.-S. Fan, R.S. Muller · 2003 · 117 citations
Dual-stage servo controller for HDD using MEMS microactuator
T. Semba, Toshiki Hirano, John Hong et al. · IEEE Transactions on Magnetics · 1999 · 102 citations
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