What is the Young's Modulus of Silicon?

Matthew A. Hopcroft, William D. Nix, Thomas W. Kenny

Journal of Microelectromechanical Systems

EngineeringMultiscale MechanicsMicromechanicsMechanical EngineeringAnisotropic Crystalline Material +20

Creating, transporting, cutting, and merging liquid droplets by electrowetting-based actuation for digital microfluidic circuits

Sung Kwon Cho, Hyejin Moon, Chang‐Jin Kim

Journal of Microelectromechanical Systems

ElectrohydrodynamicsEngineeringFluid MechanicsAnalytical MicrosystemsBiomedical Engineering +15

Passive mixing in a three-dimensional serpentine microchannel

Ruize Liu, Mark A. Stremler, Kendra V. Sharp, +5

Journal of Microelectromechanical Systems

EngineeringFluid MixingPhysicsMicrofabricationSerpentine Channel +13

Three-dimensional micro-channel fabrication in polydimethylsiloxane (PDMS) elastomer

Byung-Ho Jo, L.M. Van Lerberghe, Kathleen M. Motsegood, +1

Journal of Microelectromechanical Systems

Materials ScienceWafer Scale ProcessingEngineeringFlexible ElectronicsMicrofabrication +10

Etch rates for micromachining processing-part II

K.R. Williams, Kapil Gupta, Matthew Wasilik

Journal of Microelectromechanical Systems

EngineeringIndustrial EngineeringMaterial InnovationChemistryMicromachines +14

Studies on surface wettability of poly(dimethyl) siloxane (PDMS) and glass under oxygen-plasma treatment and correlation with bond strength

Shantanu Bhattacharya, Aniruddha Datta, Jordan M. Berg, +1

Journal of Microelectromechanical Systems

EngineeringWettingBiomedical EngineeringChemistryPolymer Technology +17

A Curved-Beam Bistable Mechanism

J. Qiu, J.H. Lang, Alex Slocum

Journal of Microelectromechanical Systems

Materials ScienceBistable BehaviorEngineeringMicrofabricationMechanics +13

M-TEST: A test chip for MEMS material property measurement using electrostatically actuated test structures

P.M. Osterberg, S.D. Senturia

Journal of Microelectromechanical Systems

EngineeringMem TestingMechanical EngineeringMicroelectromechanical SystemsMicroactuator +16

Architectures for Vibration-Driven Micropower Generators

Paul D. Mitcheson, T.C. Green, Eric M. Yeatman, +1

Journal of Microelectromechanical Systems

EngineeringEnergy ConversionMechanical EngineeringMicroactuatorPower Electronics +16

Gaseous slip flow in long microchannels

Errol B. Arkilic, Martin A. Schmidt, Kenneth Breuer

Journal of Microelectromechanical Systems

Rarefied FlowExperimental ResultsEngineeringMicrofabricationFluid Mechanics +11