Concepedia

Matthew Wasilik

MW

5

Publications

1.1K

Citations

5

H-Index

2001

Active since

Affiliations

University of California, Berkeley(Current)

Matthew Wasilik is an author at University of California, Berkeley specializing in engineering, microelectronics, and microfabrication.

Top concepts

EngineeringMicroelectronicsMicrofabricationApplied PhysicsMaterial ScienceMaterials EngineeringElectrical EngineeringChemistryMicrofluidicsNanoelectronics

Publications per year

2001–2004

5

Publications

5

Etch rates for micromachining processing-part II

K.R. Williams, Kapil Gupta, Matthew Wasilik · Journal of Microelectromechanical Systems · 2003 · 993 citations

Engineering, Industrial Engineering, Material Innovation +16

Recent progress in modularly integrated MEMS technologies

Tsu-Jae King, Roger T. Howe, Sherif Sedky et al. · 2003 · 33 citations

Electrical Engineering, Wafer Scale Processing, Engineering +11

Deep reactive ion etch conditioning recipe

Matthew Wasilik, Ning Chen · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2004 · 20 citations

Hydrogen peroxide etching and stability of p-type poly-SiGe films

Brian L. Bircumshaw, Matthew Wasilik, E.B. Kim et al. · 2004 · 13 citations

Materials Science, Materials Engineering, Engineering +12

Low-frequency process for silicon-on-insulator deep reactive ion etching

Matthew Wasilik, Albert P. Pisano · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2001 · 13 citations

Electrical Engineering, Engineering, Insulator Layer +12

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