Matthew Wasilik - Concepedia

Concepedia

Author

Matthew Wasilik

University of California, Berkeley

Also Known As

M. Wasilik, M.L. Wasilik, Matthew Wasilik

6

Publications

1.1K

Citations

5

H-Index

17

Concepts

All Affiliations

University of California, Berkeley

MW

About

Matthew Wasilik is an author at University of California, Berkeley specializing in engineering, microelectronics, and microfabrication.

Top Concepts

#	Concept	H-Index	Publications	Citations
1	Engineering	4	4	1.1K
2	Applied Physics	2	2	26
3	Electrical Engineering	2	2	46
4	Chemistry	1	1	993
5	Industrial Engineering	1	1	993

Matthew Wasilik

×

5

Publications

1.1K

Citations

5

H-Index

	Year	Citations
Etch rates for micromachining processing-part II K.R. Williams, Kapil Gupta, Matthew Wasilik Journal of Microelectromechanical Systems EngineeringIndustrial EngineeringMaterial InnovationChemistryMicromachines	2003	993
Recent progress in modularly integrated MEMS technologies Tsu-Jae King, Roger T. Howe, Sherif Sedky, Electrical EngineeringWafer Scale ProcessingEngineeringAdvanced Packaging (Semiconductors)Device Integration	2003	33
Deep reactive ion etch conditioning recipe Matthew Wasilik, Ning Chen Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE	2004	20
Hydrogen peroxide etching and stability of p-type poly-SiGe films Brian L. Bircumshaw, Matthew Wasilik, E.B. Kim, Materials ScienceMaterials EngineeringEngineeringPolymer StabilityPeroxide Etch	2004	13
Low-frequency process for silicon-on-insulator deep reactive ion etching Matthew Wasilik, Albert P. Pisano Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE Electrical EngineeringEngineeringInsulator LayerMicrofabricationNanoelectronics	2001	13

Page 1