SOFT LITHOGRAPHY

TLDR

Soft lithography is a non‑photolithographic, low‑cost strategy based on self‑assembly and replica molding that enables micro‑ and nanofabrication of structures ranging from 30 nm to 100 µm, employing five techniques: microcontact printing, replica molding, microtransfer molding, micromolding in capillaries, and solvent‑assisted micromolding. This chapter discusses the procedures for these techniques and their applications in micro‑ and nanofabrication, surface chemistry, materials science, optics, MEMS, and microelectronics. It outlines the step‑by‑step procedures for microcontact printing, replica molding, microtransfer molding, micromolding in capillaries, and solvent‑assisted micromolding, illustrating their use across the aforementioned fields.

Abstract

Abstract Soft lithography represents a non-photolithographic strategy based on self-assembly and replica molding for carrying out micro- and nanofabrication. It provides a convenient, effective, and low-cost method for the formation and manufacturing of micro- and nanostructures. In soft lithography, an elastomeric stamp with patterned relief structures on its surface is used to generate patterns and structures with feature sizes ranging from 30 nm to 100 μm. Five techniques have been demonstrated: microcontact printing (μCP), replica molding (REM), microtransfer molding (μTM), micromolding in capillaries (MIMIC), and solvent-assisted micromolding (SAMIM). In this chapter we discuss the procedures for these techniques and their applications in micro- and nanofabrication, surface chemistry, materials science, optics, MEMS, and microelectronics.