Concepedia

Soft Lithography

Soft Lithography is a microfabrication technique that uses elastomeric stamps, molds, or templates to pattern materials at the micro- and nanoscale through conformal contact, distinguishing it from conventional photolithography by eliminating the need for high-energy radiation and rigid masks.

3.8K

Publications

219.6K

Citations

14K

Authors

2.1K

Institutions

Publications per year

2017–2026

865

Parents

Children

Publications

3.8K

SOFT LITHOGRAPHY

Younan Xia, George M. Whitesides · Annual Review of Materials Science · 1998 · 4.6K citations

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Monolithic Microfabricated Valves and Pumps by Multilayer Soft Lithography

Marc Unger, Hou-Pu Chou, Todd Thorsen et al. · Science · 2000 · 4K citations

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"Dip-Pen" Nanolithography

Richard D. Piner, Jin Zhu, Feng Xu et al. · Science · 1999 · 3K citations

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Soft lithography for micro- and nanoscale patterning

Dong Qin, Younan Xia, George M. Whitesides · Nature Protocols · 2010 · 2.3K citations · Full text

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Direct Ink Writing of 3D Functional Materials

Jennifer A. Lewis · Advanced Functional Materials · 2006 · 1.7K citations

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1–5 of 3.8K

Authors

14K

  1. GM
    George M. Whitesides

    Harvard University, United States

    41 publications · 14.4K citations

    36

    h-index

  2. CA
    Chad A. Mirkin

    Northwestern University, United States

    45 publications · 7.5K citations

    34

    h-index

  3. HL
    Heon Lee

    Korea University, South Korea

    28 publications · 1.1K citations

    21

    h-index

  4. JA
    John A. Rogers

    University of Illinois Urbana-Champaign, United States

    21 publications · 3.2K citations

    19

    h-index

  5. RG
    Ralph G. Nuzzo

    University of Illinois Urbana-Champaign, United States

    20 publications · 1.8K citations

    18

    h-index

1–5 of 14K

Institutions

2.1K

  1. Harvard University

    Cambridge, United States

    54 h-index

    319 publications

    63.5K citations

  2. University of Illinois Urbana-Champaign

    Urbana, United States

    49 h-index

    339 publications

    26.2K citations

  3. Centre National de la Recherche Scientifique

    Paris, France

    42 h-index

    573 publications

    28.2K citations

  4. Northwestern University

    Evanston, United States

    40 h-index

    299 publications

    39K citations

  5. Chinese Academy of Sciences

    Beijing, China

    39 h-index

    488 publications

    30.2K citations

  6. Korea Advanced Institute of Science and Technology

    Daejeon, South Korea

    39 h-index

    352 publications

    20K citations

  7. Seoul National University

    Seoul, South Korea

    38 h-index

    268 publications

    16.8K citations

  8. Massachusetts Institute of Technology

    Cambridge, United States

    35 h-index

    220 publications

    18.4K citations

1–8 of 2.1K

Venues

  1. Advanced Materials

    151 publications · 16.1K citations

    73

    h-index

  2. Applied Physics Letters

    128 publications · 10.6K citations

    56

    h-index

  3. Microelectronic Engineering

    352 publications · 11.1K citations

    53

    h-index

  4. Langmuir

    127 publications · 9.2K citations

    52

    h-index

  5. Nano Letters

    62 publications · 5.9K citations

    46

    h-index

1–5