Imprint Lithography is a soft lithography technique that involves patterning a resist layer by mechanically deforming it with a mold to transfer a nanoscale pattern, distinguished from other patterning methods by its reliance on direct physical impression rather than photonic or electronic exposure.
742
Publications
38.8K
Citations
2.7K
Authors
560
Institutions
Publications per year
2017–2026
99
Parents
Publications
742
Nanoimprint Lithography: Methods and Material Requirements
L. Jay Guo · Advanced Materials · 2007 · 1.8K citations · Full text
1–5 of 742
Authors
2.7K
- CG
29
h-index
- SV
23
h-index
- JG
19
h-index
- DJ
19
h-index
- HL
18
h-index
1–5 of 2.7K
Institutions
560
The University of Texas at Austin
Austin, United States
34 h-index
324 publications
26.7K citations
Korea University
Seoul, South Korea
19 h-index
98 publications
3.9K citations
Motorola (United States)
Schaumburg, United States
18 h-index
110 publications
4.2K citations
Centre National de la Recherche Scientifique
Paris, France
18 h-index
113 publications
3.2K citations
Princeton University
Princeton, United States
16 h-index
59 publications
5.2K citations
Osaka Prefecture University
Sakai, Japan
16 h-index
62 publications
3.6K citations
University of Michigan
Ann Arbor, United States
15 h-index
42 publications
5.8K citations
Seoul National University
Seoul, South Korea
14 h-index
44 publications
2.8K citations
1–8 of 560
Venues
- Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena
78 publications · 4.6K citations
35
h-index
- Microelectronic Engineering
84 publications · 2.7K citations
27
h-index
- Nanotechnology
40 publications · 1.7K citations
23
h-index
- Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
61 publications · 1.9K citations
22
h-index
- Advanced Materials
28 publications · 4K citations
22
h-index
1–5