Statistics
Publications
16
Citations
1.1K
H-Index
16
Active since
1986
M. Ishida is an author at NEC (Japan) specializing in engineering, applied physics, and materials science.
Publications per year
1986–2015
16
16
Room temperature replication in spin on glass by nanoimprint technology
Satoshi� Matsui, Y. Igaku, H. Ishigaki et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2001 · 89 citations
Engineering, Glass-forming Liquid, Mechanical Engineering +21
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