Harry D. Rowland

Impact of polymer film thickness and cavity size on polymer flow during embossing: toward process design rules for nanoimprint lithography

Harry D. Rowland, Amy Cha-Tien Sun, Peter Schunk et al. · Journal of Micromechanics and Microengineering · 2005 · 185 citations

Engineering, Electron-beam Lithography, Mechanical Engineering +17

Molecular Confinement Accelerates Deformation of Entangled Polymers During Squeeze Flow

Harry D. Rowland, William P. King, J. B. Pethica et al. · Science · 2008 · 124 citations

Engineering, Mechanical Engineering, Nanostructured Polymer +16

Polymer deformation and filling modes during microembossing

Harry D. Rowland, William P. King · Journal of Micromechanics and Microengineering · 2004 · 105 citations

Engineering, Micromechanics, Mechanical Engineering +20

Simulations of nonuniform embossing: The effect of asymmetric neighbor cavities on polymer flow during nanoimprint lithography

Harry D. Rowland, William P. King, Amy Cha-Tien Sun et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2005 · 63 citations

Engineering, Mechanical Engineering, Pattern Transfer +19

Measuring Glassy and Viscoelastic Polymer Flow in Molecular-Scale Gaps Using a Flat Punch Mechanical Probe

Harry D. Rowland, William P. King, Graham L. W. Cross et al. · ACS Nano · 2008 · 25 citations

Engineering, Fluid Mechanics, Mechanical Engineering +22