Concepedia

Bulk Micromachining

Bulk Micromachining is a microfabrication technique that belongs to the class of micromachining processes, distinguished by the selective etching of bulk material from a substrate to form three-dimensional microstructures.

526

Publications

26.3K

Citations

1.8K

Authors

481

Institutions

Publications per year

2017–2026

51

Parents

Children

Publications

526

Micromachining bulk glass by use of femtosecond laser pulses with nanojoule energy

Chris B. Schaffer, A. Brodeur, Eric Mazur · Optics Letters · 2001 · 753 citations

, , +17

Bulk micromachining of silicon

G.T.A. Kovacs, N.I. Maluf, K. Petersen · Proceedings of the IEEE · 1998 · 721 citations

, , +17

Microforming—from basic research to its realization

Ulf Engel, R. Eckstein · Journal of Materials Processing Technology · 2002 · 631 citations

, , +12

Fabrication of a gradient nano-micro-structured surface layer on bulk copper by means of a surface mechanical grinding treatment

Wenwen Li, N.R. Tao, K. Lu · Scripta Materialia · 2008 · 414 citations

, , +16

Determining mean and gradient residual stresses in thin films using micromachined cantilevers

Weileun Fang, J. A. Wickert · Journal of Micromechanics and Microengineering · 1996 · 340 citations

, , +17

1–5 of 526

Authors

1.8K

  1. XL
    Xinxin Li

    Shanghai Institute of Microsystem and Information Technology, China

    10 publications · 338 citations

    10

    h-index

  2. PS
    P.M. Sarro

    Delft University of Technology, Netherlands

    10 publications · 416 citations

    10

    h-index

  3. PP
    Prem Pal

    Indian Institute of Technology Hyderabad, India

    9 publications · 251 citations

    9

    h-index

  4. DC
    Dong‐il Cho

    Seoul National University, South Korea

    8 publications · 359 citations

    8

    h-index

  5. SP
    Sang-Jun Park

    Seoul National University, South Korea

    7 publications · 276 citations

    7

    h-index

1–5 of 1.8K

Institutions

481

  1. Delft University of Technology

    Delft, The Netherlands

    16 h-index

    61 publications

    2K citations

  2. University of Michigan

    Ann Arbor, United States

    13 h-index

    34 publications

    2K citations

  3. State Key Laboratory of Transducer Technology

    Shanghai, China

    13 h-index

    49 publications

    1.7K citations

  4. Chinese Academy of Sciences

    Beijing, China

    12 h-index

    53 publications

    3K citations

  5. Seoul National University

    Seoul, South Korea

    12 h-index

    50 publications

    2K citations

  6. University of California, Los Angeles

    Los Angeles, United States

    11 h-index

    27 publications

    1.8K citations

  7. University of Twente

    Enschede, The Netherlands

    11 h-index

    42 publications

    1.7K citations

  8. Shanghai Institute of Microsystem and Information Technology

    Shanghai, China

    11 h-index

    42 publications

    1.5K citations

1–8 of 481

Venues

  1. Journal of Micromechanics and Microengineering

    JMM · 81 publications · 3.1K citations

    34

    h-index

  2. Journal of Microelectromechanical Systems

    42 publications · 3K citations

    29

    h-index

  3. Sensors and Actuators A Physical

    33 publications · 1.7K citations

    24

    h-index

  4. 13

    h-index

  5. 12

    h-index

1–5