P.M. Sarro

Silicon carbide as a new MEMS technology

P.M. Sarro · Sensors and Actuators A Physical · 2000 · 414 citations

Materials Science, Engineering, Microfabrication +6

Atomic-scale electron microscopy at ambient pressure

J.F. Creemer, Stig Helveg, G.H. Hoveling et al. · Ultramicroscopy · 2008 · 329 citations

Engineering, Electron Microscopy, Physics +5

Flexible mirror micromachined in silicon

Gleb Vdovin, P.M. Sarro · Applied Optics · 1995 · 175 citations

Optical Materials, Engineering, Soft Robotics +12

Comparison of porous silicon, porous polysilicon and porous silicon carbide as materials for humidity sensing applications

E.J. Connolly, G.M. O’Halloran, H.T.M. Pham et al. · Sensors and Actuators A Physical · 2002 · 140 citations

Materials Engineering, Materials Science, Engineering +8

Through-wafer copper electroplating for three-dimensional interconnects

Nam‐Trung Nguyen, E. Boellaard, Nga Pham et al. · Journal of Micromechanics and Microengineering · 2002 · 122 citations

Materials Science, Advanced Packaging, Electrical Engineering +15