High-aspect-ratio Structures

High-Aspect-Ratio Structures is a micromachined structural category characterized by a significantly large ratio of height to width, enabling enhanced mechanical, thermal, or electrical performance in microelectromechanical systems fabricated via bulk micromachining processes.

1.3K

Publications

69.8K

Citations

5.5K

Authors

1.2K

Institutions

Publications per year

2017–2026

272

Variants

Hars

Authors

5.5K

  1. RL
    Riikka L. Puurunen

    VTT Technical Research Centre of Finland, Finland

    9 publications · 876 citations

    9

    h-index

  2. HM
    Hideki Masuda

    Tokyo Metropolitan University, Japan

    9 publications · 324 citations

    9

    h-index

  3. HF
    Hiroyuki Fujita

    The University of Tokyo, Japan

    8 publications · 256 citations

    8

    h-index

  4. KN
    Kazuyuki Nishio

    Tokyo Metropolitan University, Japan

    8 publications · 190 citations

    8

    h-index

  5. JM
    J. Mohr

    Karlsruhe Institute of Technology, Germany

    7 publications · 207 citations

    7

    h-index

1–5 of 5.5K

Venues

  1. Journal of Micromechanics and Microengineering

    JMM · 73 publications · 2.9K citations

    32

    h-index

  2. Journal of Microelectromechanical Systems

    39 publications · 2.9K citations

    29

    h-index

  3. Applied Physics Letters

    46 publications · 2.7K citations

    27

    h-index

  4. Microsystem Technologies

    53 publications · 1.6K citations

    24

    h-index

  5. Nanotechnology

    35 publications · 1.4K citations

    22

    h-index

1–5