Concepedia

Fabrication of microstructures with high aspect ratios and great structural heights by synchrotron radiation lithography, galvanoforming, and plastic moulding (LIGA process)

E. W. Becker, W. Ehrfeld, Patric Hagmann, A. Maner, D. Münchmeyer

Microelectronic Engineering · 1986 · 958 citations · 3 references

DOI

Concepts

References

3

Silicon as a mechanical material

K. Petersen · Proceedings of the IEEE · 1982 · 2.9K citations

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Production and use of nuclear tracks: imprinting structure on solids

B.E. Fischer, R. Spohr · Reviews of Modern Physics · 1983 · 291 citations

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Production of separation-nozzle systems for uranium enrichment by a combination of X-ray lithography and galvanoplastics

Eberhard Backer, W. Ehrfeld, D. Münchmeyer et al. · Die Naturwissenschaften · 1982 · 200 citations

, , +10