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Fabrication of microstructures with high aspect ratios and great structural heights by synchrotron radiation lithography, galvanoforming, and plastic moulding (LIGA process)

Materials ScienceEngineeringPlastic MouldingMicrofabricationDigital FabricationFabrication TechniqueApplied PhysicsSynchrotron Radiation LithographyMolding (Process)3D PrintingMicrostructureNanolithography MethodLiga Process