Concepedia

Liga Process

The "LIGA Process" is a microfabrication technique that belongs to the class of lithography-based manufacturing methods, distinguished by its use of synchrotron radiation X-ray lithography to pattern thick photoresist layers, followed by electroforming and molding to produce high-aspect-ratio microstructures.

265

Publications

10.4K

Citations

777

Authors

199

Institutions

Publications per year

2017–2026

6

Variants

Liga

Parents

Publications

265

Fabrication of microstructures with high aspect ratios and great structural heights by synchrotron radiation lithography, galvanoforming, and plastic moulding (LIGA process)

E. W. Becker, W. Ehrfeld, Patric Hagmann et al. · Microelectronic Engineering · 1986 · 958 citations

, , +16

Hollow Metal Microneedles for Insulin Delivery to Diabetic Rats

S.P. Davis, Wijaya Martanto, Mark G. Allen et al. · IEEE Transactions on Biomedical Engineering · 2005 · 403 citations

, , +17

The Thirty Years War: Europe's tragedy

Choice Reviews Online · 2010 · 244 citations · Full text

, , +15

A path: from electroplating through lithographic masks in electronics to LIGA in MEMS

L. T. Romankiw · Electrochimica Acta · 1997 · 219 citations

, , +12

High-aspect-ratio micromachining via deep X-ray lithography

H. Guckel · Proceedings of the IEEE · 1998 · 140 citations

, , +15

1–5 of 265

Authors

777

  1. WE
    W. Ehrfeld

    Fraunhofer Institute for Microengineering and Microsystems, Germany

    22 publications · 1.7K citations

    16

    h-index

  2. WM
    Wolfgang Menz

    FZI Research Center for Information Technology, Germany

    14 publications · 492 citations

    13

    h-index

  3. PB
    P. Bley

    FZI Research Center for Information Technology, Germany

    14 publications · 428 citations

    13

    h-index

  4. JM
    Jürgen Mohr

    Karlsruhe Institute of Technology, Germany

    12 publications · 479 citations

    12

    h-index

  5. KW
    Kevin W. Kelly

    Louisiana State University, United States

    12 publications · 618 citations

    11

    h-index

1–5 of 777

Institutions

199

  1. Fraunhofer Institute for Microengineering and Microsystems

    Mainz, Germany

    16 h-index

    84 publications

    3.4K citations

  2. FZI Research Center for Information Technology

    Karlsruhe, Germany

    16 h-index

    83 publications

    2.4K citations

  3. Louisiana State University

    Baton Rouge, United States

    16 h-index

    68 publications

    2.7K citations

  4. University of Wisconsin–Madison

    Madison, United States

    11 h-index

    46 publications

    1.5K citations

  5. Sandia National Laboratories California

    Livermore, United States

    10 h-index

    39 publications

    618 citations

  6. National Tsing Hua University

    Hsinchu, Taiwan

    6 h-index

    13 publications

    201 citations

  7. Karlsruhe Institute of Technology

    Karlsruhe, Germany

    6 h-index

    23 publications

    777 citations

  8. University of Hyogo

    Kobe, Japan

    5 h-index

    12 publications

    505 citations

1–8 of 199

Venues

  1. Journal of Micromechanics and Microengineering

    JMM · 43 publications · 1.5K citations

    22

    h-index

  2. Microsystem Technologies

    35 publications · 1.3K citations

    20

    h-index

  3. 17

    h-index

  4. Journal of Microelectromechanical Systems

    15 publications · 785 citations

    13

    h-index

  5. Sensors and Actuators A Physical

    9 publications · 458 citations

    9

    h-index

1–5