H. Guckel

A simple technique for the determination of mechanical strain in thin films with applications to polysilicon

H. Guckel, T. Randazzo, D.W. Burns · Journal of Applied Physics · 1985 · 268 citations

Engineering, Micromechanics, Mechanical Engineering +19

Thermo-magnetic metal flexure actuators

H. Guckel, J. Klein, Todd R. Christenson et al. · 2003 · 208 citations

Engineering, Mechanical Engineering, Chemical Actuator +21

Characteristics of polysilicon resonant microbeams

J. D. Zook, D.W. Burns, H. Guckel et al. · Sensors and Actuators A Physical · 1992 · 205 citations

Polysilicon Resonant Microbeams, Engineering, Applied Physics +2

Fabrication of micromechanical devices from polysilicon films with smooth surfaces

H. Guckel, J.J. Sniegowski, Todd R. Christenson et al. · Sensors and Actuators · 1989 · 176 citations

Materials Science, Polysilicon Films, Engineering +9

Fine-grained polysilicon films with built-in tensile strain

H. Guckel, D.W. Burns, C.C.G. Visser et al. · IEEE Transactions on Electron Devices · 1988 · 157 citations

Engineering, Severe Plastic Deformation, Micromechanics +21