Publication | Closed Access
Fabrication of micromechanical devices from polysilicon films with smooth surfaces
176
Citations
8
References
1989
Year
Materials SciencePolysilicon FilmsEngineeringMicromachinesMicrofabricationMechanical EngineeringApplied PhysicsFabrication TechniqueMicroactuatorThin FilmsMicroelectronicsMicro-electromechanical System
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