J.J. Sniegowski

IC-Compatible Polysilicon Surface Micromachining

J.J. Sniegowski, Maarten P. Boer · Annual Review of Materials Science · 2000 · 253 citations

Materials Science, Microactuator Applications, Engineering +15

Characteristics of polysilicon resonant microbeams

J. D. Zook, D.W. Burns, H. Guckel et al. · Sensors and Actuators A Physical · 1992 · 205 citations

Polysilicon Resonant Microbeams, Engineering, Applied Physics +2

Fabrication of micromechanical devices from polysilicon films with smooth surfaces

H. Guckel, J.J. Sniegowski, Todd R. Christenson et al. · Sensors and Actuators · 1989 · 176 citations

Materials Science, Polysilicon Films, Engineering +9

The application of fine-grained, tensile polysilicon to mechanicaly resonant transducers

H. Guckel, J.J. Sniegowski, Todd R. Christenson et al. · Sensors and Actuators A Physical · 1990 · 144 citations

Materials Science, Engineering, Flexible Electronics +5

Surface-micromachined gear trains driven by an on-chip electrostatic microengine

J.J. Sniegowski, E. J. Garcia · IEEE Electron Device Letters · 1996 · 96 citations

Engineering, Mechanical Engineering, Micromanufacturing +16