D.W. Burns

A simple technique for the determination of mechanical strain in thin films with applications to polysilicon

H. Guckel, T. Randazzo, D.W. Burns · Journal of Applied Physics · 1985 · 268 citations

Engineering, Micromechanics, Mechanical Engineering +19

Characteristics of polysilicon resonant microbeams

J. D. Zook, D.W. Burns, H. Guckel et al. · Sensors and Actuators A Physical · 1992 · 205 citations

Polysilicon Resonant Microbeams, Engineering, Applied Physics +2

Fine-grained polysilicon films with built-in tensile strain

H. Guckel, D.W. Burns, C.C.G. Visser et al. · IEEE Transactions on Electron Devices · 1988 · 157 citations

Engineering, Severe Plastic Deformation, Micromechanics +21

Diagnostic microstructures for the measurement of intrinsic strain in thin films

H. Guckel, D.W. Burns, C.R. Rutigliano et al. · Journal of Micromechanics and Microengineering · 1992 · 150 citations

Engineering, Mechanical Engineering, Diagnostic Microstructures +16

Sealed-cavity resonant microbeam pressure sensor

D.W. Burns, J. D. Zook, R. D. Horning et al. · Sensors and Actuators A Physical · 1995 · 96 citations

Micro-optical Component, Sensor Technology, Micro-electromechanical System +1