D.W. Burns

A simple technique for the determination of mechanical strain in thin films with applications to polysilicon

H. Guckel, T. Randazzo, D.W. Burns · Journal of Applied Physics · 1985 · 270 citations

Natural Sciences, Materials Engineering, Materials Science +17

Characteristics of polysilicon resonant microbeams

J. D. Zook, D.W. Burns, H. Guckel et al. · Sensors and Actuators A Physical · 1992 · 206 citations

Engineering, Materials Science, Microfabrication +6

Fine-grained polysilicon films with built-in tensile strain

H. Guckel, D.W. Burns, C.C.G. Visser et al. · IEEE Transactions on Electron Devices · 1988 · 158 citations

Natural Sciences, Materials Engineering, Materials Science +16

Diagnostic microstructures for the measurement of intrinsic strain in thin films

H. Guckel, D.W. Burns, C.R. Rutigliano et al. · Journal of Micromechanics and Microengineering · 1992 · 150 citations

Natural Sciences, Materials Engineering, Materials Science +17

Sealed-cavity resonant microbeam pressure sensor

D.W. Burns, J. D. Zook, R. D. Horning et al. · Sensors and Actuators A Physical · 1995 · 96 citations

Engineering, Mechanical Engineering, Microelectromechanical Systems +11