Concepedia

Publication | Closed Access

Characteristics of polysilicon resonant microbeams

DOI

205

Citations

19

References

1992

Year

J. D. Zook, D.W. Burns, H. Guckel, J.J. Sniegowski, Roxann L. Engelstad, Z. Feng
Sensors and Actuators A Physical

References

YearCitations

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