Roxann L. Engelstad

Characteristics of polysilicon resonant microbeams

J. D. Zook, D.W. Burns, H. Guckel et al. · Sensors and Actuators A Physical · 1992 · 205 citations

Polysilicon Resonant Microbeams, Engineering, Applied Physics +2

Resonant microbeam strain transducers

J. D. Zook, D.W. Burns, H. Guckel et al. · TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers · 2002 · 25 citations

Engineering, Micromechanics, Mechanical Engineering +19

Analysis of Coulomb and Johnsen-Rahbek electrostatic chuck performance for extreme ultraviolet lithography

M. R. Sogard, Andrew R. Mikkelson, Madhura Nataraju et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2007 · 18 citations

Electrical Engineering, Engineering, Extreme Ultraviolet Lithography +11

Design Issues for a Light Ion Beam LMF Driver

J.J. Ramirez, R.W. Stinnett, D.L. Johnson et al. · Fusion Technology · 1989 · 16 citations

Photonics, Electrical Engineering, Engineering +12

Predicting mechanical distortions in x-ray masks

Eric P. Cotte, Roxann L. Engelstad, Edward G. Lovell et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1999 · 16 citations

Engineering, Electron-beam Lithography, Mechanical Engineering +21