TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers

Silicon monolithic micromechanical gyroscope

Paul Greiff, Burton Boxenhorn, Tsu‐Jae King et al. · 2002 · 142 citations

Engineering, Electrical Engineering, Mechanical Engineering +17

Atomic force microscopy using a piezoresistive cantilever

M. Tortonese, Hirofumi Yamada, R. C. Barrett et al. · 2002 · 134 citations

Engineering, Electrical Engineering, Microfabrication +16

TMAHW etchants for silicon micromachining

Uwe Schnakenberg, W. Benecke, Peter J. de Lange · 1991 · 109 citations

Engineering, Materials Engineering, Materials Science +17

On the resonance frequencies of microbridges

S. Bouwstra · 2002 · 84 citations

Engineering, Mechanical Engineering, Structural Analysis +16

Resonant beam pressure sensor fabricated with silicon fusion bonding

K. Petersen, F. Pourahmadi, Joe Brown et al. · 2002 · 75 citations

Engineering, Aerospace Engineering, Materials Science +17