Joe Brown

Silicon fusion bonding and deep reactive ion etching: a new technology for microstructures

E.H. Klaassen, K. Petersen, J.M. Noworolski et al. · Sensors and Actuators A Physical · 1996 · 192 citations

Materials Science, Materials Engineering, Ion Implantation +12

Silicon fusion bonding for pressure sensors

K. Petersen, Philip W. Barth, J. Poydock et al. · 2003 · 130 citations

Novel Processes, Engineering, Silicon Fusion Bonding +21

Silicon Fusion Bonding and Deep Reactive Ion Etching a New Technology for Microstructures

E.H. Klaassen, K. Petersen, J.M. Noworolski et al. · Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95 · 2005 · 78 citations

Engineering, New Technology, Silicon Fusion Bonding +19

Resonant beam pressure sensor fabricated with silicon fusion bonding

K. Petersen, F. Pourahmadi, Joe Brown et al. · TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers · 2002 · 75 citations

Photonic Sensor, Engineering, Measurement +17

Ultra-stable, high-temperature pressure sensors using silicon fusion bonding

K. Petersen, Joe Brown, Ted Vermeulen et al. · Sensors and Actuators A Physical · 1990 · 52 citations

Materials Science, Engineering, Sensors +6